sentronics metrology GmbH
Sentronics Metrology is a leader in optical interferometry and optical reflectometry for wafers and panels. Applications cover all process steps from FEOL, BEOL, through Advanced Packaging. Founded in 2006 and headquartered in Mannheim, Germany, Sentronics has achieved a major customer base.
Role
Sentronics will develop and integrate sensors in its WMC platform for ultra-fast 3D measurements and assess the potential of this technology for topography measurements, by utilizing internal and/or consortium-supplied wafer samples.
Key Contribution
Sentronics aims to achieve lateral resolution down to 1 μm and 25 nm axial in ultra-fast 3D measurements. Sentronics will perform and evaluate test measurements on internal samples and samples from consortium partners to assess the potential of this technology for topography measurements.
sentronics metrology GmbH
Dudenstr. 27-35
68167 Mannheim
Germany
