E2Packman

Develop Inline Spectral Interferometry [SI] metrology for topographic and other dimensional measurement challenges in AP Tailor dedicated SI measurement sequences, data processing techniques, algo, UI, SW Automate selected solution with user flexibility

Starting with existing SotA Spectral Interferometry [SI] metrology at Nova, which is currently used for Frontend of Line Logic and Memory dimensional metrology, we here propose to achieve BSotA SI, and apply the tool at Backend of Line and Advanced Packaging (AP), after completing the dedicated RnD phase, development of new measurement methods & algorithms, and achieving high accuracy, repeatability, and throughput.