Graz Center for Electron Microscopy
The Graz Center for Electron Microscopy (ZFE) together with the Institute for Electron Microscopy and Nanoanalysis (FELMI) of the Graz University of Technology (TU Graz) represents the leading Austrian research institution in the field of advanced materials microscopy, analysis, and nanotechnology.
Advanced electron microscopy provides unique insights into the micro-and nano-world and is therefore an important prerequisite and essential key to innovations, especially in materials research and nanotechnology. Consequently, the institute concentrates its research activities on the development of new microscopic methods and their application to challenging themes in physics, chemistry, semiconductor and materials research and nanotechnology.
Major areas of our research are:
- Micro- and nanoanalysis of materials: Scanning electron microscopy, atomic force microscopy, Raman and infrared microscopy, transmission electron microscopy with the unique Austrian Scanning Transmission Electron Microscope (ASTEM) providing atomic resolution.
- Nanofabrication of functional devices by means of focused ion and electron microscopy
- 3D and in-situ characterization of materials and biomaterials
A unique feature of the institute is its broad field of activities ranging from fundamental research to teaching activities and service research for other institutes and industries.
Role
The ZFE Graz is the project partner in E2PackMan for electron microscopic investigations, mainly of interfaces. Our instruments provide insights into the nanostructure of the devices down to the atomic level by using high-resolution structural and chemical analysis using advanced electron microscopy techniques. To study the interfaces at different length scales, we use scanning and transmission electron microscopy (SEM, TEM) based methods. Morphological and chemical analysis are performed in order to elucidate failure mechanisms, reliability issues, and the influence of different (new) material combinations.
Key Contribution
The ZFE Graz assists the project partners in interface analysis and development of failure analysis models by providing verification of structures via high-resolution, analytical electron microscopy. The focus of our contribution is on vertical interconnects within devices and interfaces between chip, substrate, and package. The interfaces are analyzed at different length scales in the SEM and in the TEM. A central aspect of these investigations involves high resolution work in the TEM, encompassing imaging and chemical analysis with low detection sensitivities. Complementary, SEM investigations (also at elevated temperatures) are performed for the characterization of surfaces excavated at relevant device locations.
